Chen ' Some New Applications of MEMS in the Biomedical and Environmental Fields ', Advanced Materials Research, Vol. A Practical Guide to Design, Analysis and Applications, Springer,( 2006). Jha, MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications, CRC Press,( 2008). Mohamed Gad-el-Hak, The MEMS Handbook: actions Applications, CRC Press,( 2006). Reza Ghodssi and Pinyen Lin, MEMS Materials and Processes Handbook, Springer,( 2011).
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