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Nava Setter, Electroceramic-based MEMS: Fabrication-Technology and Applications, Springer,( 2009). Shea, MEMS Reliability, Springer,( 2010). Nano-Devices, Sensors and Actuators, Springer,( 2010). Priyanka Aggarwal, Zainab Syed, academic Noureldin and Naser El-Sheimy, public Integrated Navigation, Artech House,( 2010). Andrew McWilliams, MEMS: Biosensors and Nanosensors, BCC Research,( 2011). Volker Kempe, Inertial MEMS: Principles and Practice, Cambridge,( 2011). With Applications to MEMS and NEMS, Springer,( 2012).