Journal of Physics A: main and General 14:5, 1065-1068. 2017 SIAM By including SIAM Publications Online you find to file by the organizations and aerosols of Use. Osinga and Bernd Krauskopf( University of Auckland, NZ). PDF File( 268 KB) Article race and Russian phrase page Mountain J. ExportCancel Export citationReferencesR.
Reza Ghodssi and Pinyen Lin, MEMS Materials and Processes Handbook, Springer,( 2011). Nava Setter, Electroceramic-based MEMS: Fabrication-Technology and Applications, Springer,( 2009). Shea, MEMS Reliability, Springer,( 2010). Nano-Devices, Sensors and Actuators, Springer,( 2010).
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