Reza Ghodssi and Pinyen Lin, MEMS Materials and Processes Handbook, Springer,( 2011). Nava Setter, Electroceramic-based MEMS: Fabrication-Technology and Applications, Springer,( 2009). Shea, MEMS Reliability, Springer,( 2010). Nano-Devices, Sensors and Actuators, Springer,( 2010).
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