Jha, MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications, CRC Press,( 2008). Mohamed Gad-el-Hak, The MEMS Handbook: areas Applications, CRC Press,( 2006). Reza Ghodssi and Pinyen Lin, MEMS Materials and Processes Handbook, Springer,( 2011). Nava Setter, Electroceramic-based MEMS: Fabrication-Technology and Applications, Springer,( 2009).
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